Geodesic
Simulation of Volume Treatment Mechanism of Capillary-porous Materials in Low Pressure Radiofrequency Plasmas
Učënye zapiski Kazanskogo universiteta. Seriâ Fiziko-matematičeskie nauki, Kazanskii Gosudarstvennyi Universitet. Uchenye Zapiski. Seriya Fiziko-Matematichaskie Nauki, Tome 150 (2008) no. 4, pp. 106-112 Cet article a éte moissonné depuis la source Math-Net.Ru

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Physical effect of volumetric modification of capillary-porous materials in low pressure RF plasmas is simulated. As it can be concluded from calculations, non-self-maintained discharge may be a reason of volumetric modification. This discharge appears in porous volume in a series of electron and ion emission from nanopore surfaces. Transmission of kinetic energy and recombination of charged particles on nanopore surfaces leads to a change of surface properties. That is interpreted as volumetric modification of capillary-porous materials.
Keywords: radiofrequency plasma, low pressure, nanoporous disharge, volume modification of nanoporous materials.
Mots-clés : simulation 
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     author = {V. S. Zheltoukhin and G. N. Koulevtsov and G. R. Rakhmatoullina and A. M. Sungatoullin},
     title = {Simulation of {Volume} {Treatment} {Mechanism} of {Capillary-porous} {Materials} in {Low} {Pressure} {Radiofrequency} {Plasmas}},
     journal = {U\v{c}\"enye zapiski Kazanskogo universiteta. Seri\^a Fiziko-matemati\v{c}eskie nauki},
     pages = {106--112},
     year = {2008},
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     url = {http://geodesic.mathdoc.fr/item/UZKU_2008_150_4_a8/}
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V. S. Zheltoukhin; G. N. Koulevtsov; G. R. Rakhmatoullina; A. M. Sungatoullin. Simulation of Volume Treatment Mechanism of Capillary-porous Materials in Low Pressure Radiofrequency Plasmas. Učënye zapiski Kazanskogo universiteta. Seriâ Fiziko-matematičeskie nauki, Kazanskii Gosudarstvennyi Universitet. Uchenye Zapiski. Seriya Fiziko-Matematichaskie Nauki, Tome 150 (2008) no. 4, pp. 106-112. http://geodesic.mathdoc.fr/item/UZKU_2008_150_4_a8/

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