Three-dimensional Structure of Electromagnetic Fields in an Inductively Coupled Plasma.
Učënye zapiski Kazanskogo universiteta. Seriâ Fiziko-matematičeskie nauki, Kazanskii Gosudarstvennyi Universitet. Uchenye Zapiski. Seriya Fiziko-Matematichaskie Nauki, Tome 150 (2008) no. 3, pp. 67-72

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A new method for calculating three-dimensional structure of electromagnetic fields in inductively coupled plasma is developed. The method is based on Fourier expansion of electromagnetic fields and plasma conductivity to polar harmonics. A temporal dynamics of three-dimensional spatial structure of electromagnetic fields in the inductively coupled plasma and spatial distribution of energy fluxes into plasma are calculated. Asymmetrical shape of the inductor is shown to result in significant asymmetry of electromagnetic fields in inductively coupled plasma.
Keywords: inductively coupled plasma, numerical methods, electromagnetic fields, vector potential
Mots-clés : Fourier expansion.
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     author = {M. V. Morozov and A. E. Staroverov and A. Kh. Gil'mutdinov and M. Kh. Salahov},
     title = {Three-dimensional {Structure} of {Electromagnetic} {Fields} in an {Inductively} {Coupled} {Plasma.}},
     journal = {U\v{c}\"enye zapiski Kazanskogo universiteta. Seri\^a Fiziko-matemati\v{c}eskie nauki},
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     url = {http://geodesic.mathdoc.fr/item/UZKU_2008_150_3_a6/}
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M. V. Morozov; A. E. Staroverov; A. Kh. Gil'mutdinov; M. Kh. Salahov. Three-dimensional Structure of Electromagnetic Fields in an Inductively Coupled Plasma.. Učënye zapiski Kazanskogo universiteta. Seriâ Fiziko-matematičeskie nauki, Kazanskii Gosudarstvennyi Universitet. Uchenye Zapiski. Seriya Fiziko-Matematichaskie Nauki, Tome 150 (2008) no. 3, pp. 67-72. http://geodesic.mathdoc.fr/item/UZKU_2008_150_3_a6/