Geodesic
Algorithm for controlling the process of spraying optical coatings based on sample broadband measurement data
Sibirskij žurnal industrialʹnoj matematiki, Tome 26 (2023) no. 3, pp. 169-178.

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An algorithm for controlling the deposition process of optical coatings based on the analysis of sample data of broadband measurements for a fixed set of wavelengths is considered. The considered algorithm uses broadband measurement data on the one hand, which is an advantage compared to using only monochromatic measurement data for one fixed wavelength, and on the other hand is fast-acting compared to algorithms using full broadband measurement data. It is demonstrated that the proposed algorithm makes it possible to obtain sufficiently accurate estimates of the thicknesses of layers of sprayed multilayer optical coatings.
Keywords: optical coatings, coating spraying, broadband control, monochromatic control. 
@article{SJIM_2023_26_3_a12,
     author = {V. D. Shinkarev and D. V. Lukyanenko and A. V. Tikhonravov and A. G. Yagola},
     title = {Algorithm for controlling the process of spraying optical coatings based on sample broadband measurement data},
     journal = {Sibirskij \v{z}urnal industrialʹnoj matematiki},
     pages = {169--178},
     publisher = {mathdoc},
     volume = {26},
     number = {3},
     year = {2023},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/SJIM_2023_26_3_a12/}
}
TY  - JOUR
AU  - V. D. Shinkarev
AU  - D. V. Lukyanenko
AU  - A. V. Tikhonravov
AU  - A. G. Yagola
TI  - Algorithm for controlling the process of spraying optical coatings based on sample broadband measurement data
JO  - Sibirskij žurnal industrialʹnoj matematiki
PY  - 2023
SP  - 169
EP  - 178
VL  - 26
IS  - 3
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/SJIM_2023_26_3_a12/
LA  - ru
ID  - SJIM_2023_26_3_a12
ER  - 
%0 Journal Article
%A V. D. Shinkarev
%A D. V. Lukyanenko
%A A. V. Tikhonravov
%A A. G. Yagola
%T Algorithm for controlling the process of spraying optical coatings based on sample broadband measurement data
%J Sibirskij žurnal industrialʹnoj matematiki
%D 2023
%P 169-178
%V 26
%N 3
%I mathdoc
%U http://geodesic.mathdoc.fr/item/SJIM_2023_26_3_a12/
%G ru
%F SJIM_2023_26_3_a12
V. D. Shinkarev; D. V. Lukyanenko; A. V. Tikhonravov; A. G. Yagola. Algorithm for controlling the process of spraying optical coatings based on sample broadband measurement data. Sibirskij žurnal industrialʹnoj matematiki, Tome 26 (2023) no. 3, pp. 169-178. http://geodesic.mathdoc.fr/item/SJIM_2023_26_3_a12/

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