Geodesic
On the functioning of a~VHF microelectromechanical resonator
Sibirskij žurnal industrialʹnoj matematiki, Tome 16 (2013) no. 4, pp. 75-86

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We consider a new design of a microelectromechanical resonator with micrometer dimensions operating at gigahertz frequencies, previously proposed by the authors. The article contains a description of technological problems of the realization of a microelectromechanical resonator as well as a rigorous justification of its functioning in a mathematical model. In analytical form, we establish a connection between auto-oscillations of the mobile element of the microresonator generated by electrostatic attraction during startup, and the parameters of the natural oscillations which turn into auto-oscillations at the end of the startup.
Keywords: VHF MEMS, microresonator, frequency generator, electrostatic attraction, rigidity of a spring.
Mots-clés : auto-oscillation, phase portrait 
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     author = {E. G. Kostsov and S. I. Fadeev},
     title = {On the functioning of {a~VHF} microelectromechanical resonator},
     journal = {Sibirskij \v{z}urnal industrialʹnoj matematiki},
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E. G. Kostsov; S. I. Fadeev. On the functioning of a~VHF microelectromechanical resonator. Sibirskij žurnal industrialʹnoj matematiki, Tome 16 (2013) no. 4, pp. 75-86. http://geodesic.mathdoc.fr/item/SJIM_2013_16_4_a6/