Sources of low-energy charged particle beams
Problemy fiziki, matematiki i tehniki, no. 4 (2014), pp. 7-9
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Some results obtained in the development of low-energy IEP forming electron and ion beams with parameters sufficient for a number of surface modification technologies are presented.
Keywords:
low-energy beams, electron source, electrode structure.
@article{PFMT_2014_4_a0,
author = {V. A. Gruzdev and V. G. Zalesski and P. N. Soldatenko},
title = {Sources of low-energy charged particle beams},
journal = {Problemy fiziki, matematiki i tehniki},
pages = {7--9},
year = {2014},
number = {4},
language = {ru},
url = {http://geodesic.mathdoc.fr/item/PFMT_2014_4_a0/}
}
V. A. Gruzdev; V. G. Zalesski; P. N. Soldatenko. Sources of low-energy charged particle beams. Problemy fiziki, matematiki i tehniki, no. 4 (2014), pp. 7-9. http://geodesic.mathdoc.fr/item/PFMT_2014_4_a0/
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