Geodesic
MEMS Sensor of Force
Russian journal of nonlinear dynamics, Tome 16 (2020) no. 1, pp. 85-92

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The paper is focused on the design of a compact compliant mechanical body (CCMB) that will be used as a transducer of the one-axis force to the distance of two plates. The conversion principle of the distance (which carries information about the acting force) to the frequency of the electrical signal is carefully described in the article too.
Keywords: compact compliant mechanical body, mechanical force sensor, transfer response. 
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     author = {R. Hart'ansk\'y and J. Hricko and M. Mierka and J. Halgo\v{s} and M. Dzuri\v{s}},
     title = {MEMS {Sensor} of {Force}},
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     pages = {85--92},
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R. Hart'anský; J. Hricko; M. Mierka; J. Halgoš; M. Dzuriš. MEMS Sensor of Force. Russian journal of nonlinear dynamics, Tome 16 (2020) no. 1, pp. 85-92. http://geodesic.mathdoc.fr/item/ND_2020_16_1_a6/