Geodesic
Inertial nanostep piezoelectric drive: modeling and experiment
Nanosistemy: fizika, himiâ, matematika, Tome 15 (2024) no. 5, pp. 643-653 Cet article a éte moissonné depuis la source Math-Net.Ru

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A vertical inertial nanostep piezoelectric drive is considered. A virtual model was created, and the operating modes of a real drive were studied by numerical experiment. Piezo electromechanical resonance was discovered and a method to eliminate resonant vibrations by increasing electrical losses in the discharge circuit of the piezo actuator capacitance was proposed. A satisfactory agreement between the calculated and experimental data for the drive steps in the nanometer displacement range was obtained.
Keywords: inertial piezoelectric drive, nano positioning system, piezo actuator, piezoelectric effect. 
@article{NANO_2024_15_5_a6,
     author = {Olga M. Gorbenko and Stanislav Y. Lukashenko and Stepan V. Pichakhchi and Ivan D. Sapozhnikov and Mikhail L. Fel'shtyn and Alexander O. Golubok},
     title = {Inertial nanostep piezoelectric drive: modeling and experiment},
     journal = {Nanosistemy: fizika, himi\^a, matematika},
     pages = {643--653},
     year = {2024},
     volume = {15},
     number = {5},
     language = {en},
     url = {http://geodesic.mathdoc.fr/item/NANO_2024_15_5_a6/}
}
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AU  - Alexander O. Golubok
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%A Ivan D. Sapozhnikov
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%A Alexander O. Golubok
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Olga M. Gorbenko; Stanislav Y. Lukashenko; Stepan V. Pichakhchi; Ivan D. Sapozhnikov; Mikhail L. Fel'shtyn; Alexander O. Golubok. Inertial nanostep piezoelectric drive: modeling and experiment. Nanosistemy: fizika, himiâ, matematika, Tome 15 (2024) no. 5, pp. 643-653. http://geodesic.mathdoc.fr/item/NANO_2024_15_5_a6/