Geodesic
Electrical properties of ``metal-carbon film'' contact
Nanosistemy: fizika, himiâ, matematika, Tome 14 (2023) no. 1, pp. 86-88

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Magnetron sputtering was used to obtain carbon films on of metal substrates of two types: titanium and tool chromium steel. The temperature dependence of the resistance of the films, which has a semiconductor character, has been studied. The current-voltage characteristics of the metal-carbon film contact were determined, which indicate the presence of the Schottky barrier junction.
Keywords: magnetron sputtering, metal-semiconductor contact
Mots-clés : carbon film, Schottky barrier. 
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     title = {Electrical properties of ``metal-carbon film'' contact},
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Rostyslav V. Shalayev; Anatoliy I. Izotov; Vladimir V. Syrotkin. Electrical properties of ``metal-carbon film'' contact. Nanosistemy: fizika, himiâ, matematika, Tome 14 (2023) no. 1, pp. 86-88. http://geodesic.mathdoc.fr/item/NANO_2023_14_1_a9/