Geodesic
Ultraviolet and visible reflective TiO$_{2}$/SiO$_{2}$ thin films on silicon using sol-gel spin coater
Nanosistemy: fizika, himiâ, matematika, Tome 12 (2021) no. 3, pp. 311-316.

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TiO$_{2}$SiO$_{2}$ alternative thin films (stacks) were deposited on silicon substrates using sol-gel spin-coating techniques. The prepared samples had their corresponding optical properties analyzed by UV-Visible spectrophotometry (UV-Vis), X-ray diffractometry (XRD), a surface profilometer, and Raman spectroscopy. The optical and crystallization properties of thin films were varied and compared by changing the number of stacks. UV-Vis spectrum showed high reflectance and shifting towards the infrared region with effect of increased TiO$_{2}$/SiO$_{2}$ stacks. XRD spectra confirmed the existence of anatase TiO$_{2}$ and SiO$_{2}$ diffraction peaks. The multilayer film thickness was calculated at 109 and 151 nm at two and four stacks by a surface profilometer. The Raman spectra confirmed the Si-O-Si and TiO$_{2}$ stretching modes at 2600, 980, and 519 cm$^{-1}$. This investigation reveals the promising and effective UV-Visible reflective property of alternative TiO$_{2}$/SiO$_{2}$ thin films on a silicon substrate.
Keywords: Sol-gel, reflectance, multilayer, anatase, thickness. 
@article{NANO_2021_12_3_a6,
     author = {S. Saravanan and R. S. Dubey},
     title = {Ultraviolet and visible reflective {TiO}$_{2}${/SiO}$_{2}$ thin films on silicon using sol-gel spin coater},
     journal = {Nanosistemy: fizika, himi\^a, matematika},
     pages = {311--316},
     publisher = {mathdoc},
     volume = {12},
     number = {3},
     year = {2021},
     language = {en},
     url = {http://geodesic.mathdoc.fr/item/NANO_2021_12_3_a6/}
}
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S. Saravanan; R. S. Dubey. Ultraviolet and visible reflective TiO$_{2}$/SiO$_{2}$ thin films on silicon using sol-gel spin coater. Nanosistemy: fizika, himiâ, matematika, Tome 12 (2021) no. 3, pp. 311-316. http://geodesic.mathdoc.fr/item/NANO_2021_12_3_a6/