Simulation of secondary electron transport in thin metal and fullerite films
Nanosistemy: fizika, himiâ, matematika, Tome 5 (2014) no. 1, pp. 81-85
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Excitation processes and transport of recoiled and secondary electrons generated in fullerite and metal films under photons and electron irradiation were studied by computer simulation. Studied processes resulting in polymerization of fullerite were considered as the basic ones in formation of a pixel in electron nanolithography with fullerite film as an electron-beam resist. Reliability of the computer model and the important role of secondary electrons in the process of pixel formation were confirmed by comparison of the sizes of the calculated secondary electron swarm and the experimental cluster-pixel obtained previously. The photoelectron yield dependence on the incident photon's energy was also obtained with the same computer model for metal foils which can be used as a radiation stripdetector.
Keywords:
fullerite, films, electron beams, electronic properties.
@article{NANO_2014_5_1_a8,
author = {E. O. Petrenko and M. V. Makarets and V. M. Mikushkin and V. M. Pugatch},
title = {Simulation of secondary electron transport in thin metal and fullerite films},
journal = {Nanosistemy: fizika, himi\^a, matematika},
pages = {81--85},
publisher = {mathdoc},
volume = {5},
number = {1},
year = {2014},
language = {en},
url = {http://geodesic.mathdoc.fr/item/NANO_2014_5_1_a8/}
}
TY - JOUR AU - E. O. Petrenko AU - M. V. Makarets AU - V. M. Mikushkin AU - V. M. Pugatch TI - Simulation of secondary electron transport in thin metal and fullerite films JO - Nanosistemy: fizika, himiâ, matematika PY - 2014 SP - 81 EP - 85 VL - 5 IS - 1 PB - mathdoc UR - http://geodesic.mathdoc.fr/item/NANO_2014_5_1_a8/ LA - en ID - NANO_2014_5_1_a8 ER -
%0 Journal Article %A E. O. Petrenko %A M. V. Makarets %A V. M. Mikushkin %A V. M. Pugatch %T Simulation of secondary electron transport in thin metal and fullerite films %J Nanosistemy: fizika, himiâ, matematika %D 2014 %P 81-85 %V 5 %N 1 %I mathdoc %U http://geodesic.mathdoc.fr/item/NANO_2014_5_1_a8/ %G en %F NANO_2014_5_1_a8
E. O. Petrenko; M. V. Makarets; V. M. Mikushkin; V. M. Pugatch. Simulation of secondary electron transport in thin metal and fullerite films. Nanosistemy: fizika, himiâ, matematika, Tome 5 (2014) no. 1, pp. 81-85. http://geodesic.mathdoc.fr/item/NANO_2014_5_1_a8/