Geodesic
Simulation of secondary electron transport in thin metal and fullerite films
Nanosistemy: fizika, himiâ, matematika, Tome 5 (2014) no. 1, pp. 81-85.

Voir la notice de l'article provenant de la source Math-Net.Ru

Excitation processes and transport of recoiled and secondary electrons generated in fullerite and metal films under photons and electron irradiation were studied by computer simulation. Studied processes resulting in polymerization of fullerite were considered as the basic ones in formation of a pixel in electron nanolithography with fullerite film as an electron-beam resist. Reliability of the computer model and the important role of secondary electrons in the process of pixel formation were confirmed by comparison of the sizes of the calculated secondary electron swarm and the experimental cluster-pixel obtained previously. The photoelectron yield dependence on the incident photon's energy was also obtained with the same computer model for metal foils which can be used as a radiation stripdetector.
Keywords: fullerite, films, electron beams, electronic properties. 
@article{NANO_2014_5_1_a8,
     author = {E. O. Petrenko and M. V. Makarets and V. M. Mikushkin and V. M. Pugatch},
     title = {Simulation of secondary electron transport in thin metal and fullerite films},
     journal = {Nanosistemy: fizika, himi\^a, matematika},
     pages = {81--85},
     publisher = {mathdoc},
     volume = {5},
     number = {1},
     year = {2014},
     language = {en},
     url = {http://geodesic.mathdoc.fr/item/NANO_2014_5_1_a8/}
}
TY  - JOUR
AU  - E. O. Petrenko
AU  - M. V. Makarets
AU  - V. M. Mikushkin
AU  - V. M. Pugatch
TI  - Simulation of secondary electron transport in thin metal and fullerite films
JO  - Nanosistemy: fizika, himiâ, matematika
PY  - 2014
SP  - 81
EP  - 85
VL  - 5
IS  - 1
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/NANO_2014_5_1_a8/
LA  - en
ID  - NANO_2014_5_1_a8
ER  - 
%0 Journal Article
%A E. O. Petrenko
%A M. V. Makarets
%A V. M. Mikushkin
%A V. M. Pugatch
%T Simulation of secondary electron transport in thin metal and fullerite films
%J Nanosistemy: fizika, himiâ, matematika
%D 2014
%P 81-85
%V 5
%N 1
%I mathdoc
%U http://geodesic.mathdoc.fr/item/NANO_2014_5_1_a8/
%G en
%F NANO_2014_5_1_a8
E. O. Petrenko; M. V. Makarets; V. M. Mikushkin; V. M. Pugatch. Simulation of secondary electron transport in thin metal and fullerite films. Nanosistemy: fizika, himiâ, matematika, Tome 5 (2014) no. 1, pp. 81-85. http://geodesic.mathdoc.fr/item/NANO_2014_5_1_a8/