The catalytic action of vanadium and its oxide (V) in the oxidation processes of A$^{\mathrm{III}}$ B$^{\mathrm{V}}$ semiconductors
Nanosistemy: fizika, himiâ, matematika, Tome 3 (2012) no. 2, pp. 116-138
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The catalytic synchronous mechanism effect of deposited nanoscale layers of chemostimulaters V and V$_2$O$_5$ on the surface of InP and GaAs in the process of thermal oxidation these semiconductors was established. The proof of this mechanism is a abrupt decline in the effective activation energy of processes, a significant increase in the rate of film growth compared with its own oxidation, regeneration of active particles containing V$^{+5}$ (data of XRD, IRS, AES), the independence of the kinetic parameters of oxidation processes on the amount of applied catalyst. Thermal oxidation of InP in the presence of nanoislands of V$_2$O$_5$ in the initial stage of the process occurs mainly in those catalytically active centers (accordingly to the data of SEM, AES).
Keywords:
heterostructure, chemical stimulated oxidation, catalysis, gallium arsenide
Mots-clés : transit, indium phosphide.
Mots-clés : transit, indium phosphide.
@article{NANO_2012_3_2_a10,
author = {I. Ya. Mittova and E. V. Tomina and A. A. Lapenko and B. V. Sladkopevtsev},
title = {The catalytic action of vanadium and its oxide {(V)} in the oxidation processes of {A}$^{\mathrm{III}}$ {B}$^{\mathrm{V}}$ semiconductors},
journal = {Nanosistemy: fizika, himi\^a, matematika},
pages = {116--138},
year = {2012},
volume = {3},
number = {2},
language = {ru},
url = {http://geodesic.mathdoc.fr/item/NANO_2012_3_2_a10/}
}
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AU - I. Ya. Mittova
AU - E. V. Tomina
AU - A. A. Lapenko
AU - B. V. Sladkopevtsev
TI - The catalytic action of vanadium and its oxide (V) in the oxidation processes of A$^{\mathrm{III}}$ B$^{\mathrm{V}}$ semiconductors
JO - Nanosistemy: fizika, himiâ, matematika
PY - 2012
SP - 116
EP - 138
VL - 3
IS - 2
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ID - NANO_2012_3_2_a10
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%A B. V. Sladkopevtsev
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I. Ya. Mittova; E. V. Tomina; A. A. Lapenko; B. V. Sladkopevtsev. The catalytic action of vanadium and its oxide (V) in the oxidation processes of A$^{\mathrm{III}}$ B$^{\mathrm{V}}$ semiconductors. Nanosistemy: fizika, himiâ, matematika, Tome 3 (2012) no. 2, pp. 116-138. http://geodesic.mathdoc.fr/item/NANO_2012_3_2_a10/