Geodesic
Numerical modelling of vapor phase epitaxy with diffusion processes
Matematičeskoe modelirovanie, Tome 29 (2017) no. 10, pp. 75-85

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The mathematical model of heat conduction with features of heat and mass transfer during vapor phase epitaxy on a curvilinear surface is offered. With use of an integro-interpolation method the differential scheme is constructed, the numerical solution of an objective is found. Approximation and stability of the differential scheme are investigated. Examples of numerical calculation for various materials are provided.
Keywords: vapor phase epitaxy, heat equation, curvilinear surface, difference scheme. 
@article{MM_2017_29_10_a6,
     author = {G. N. Kuvyrkin and I. Yu. Savelyeva and A. V. Zhuravsky},
     title = {Numerical modelling of vapor phase epitaxy with diffusion processes},
     journal = {Matemati\v{c}eskoe modelirovanie},
     pages = {75--85},
     publisher = {mathdoc},
     volume = {29},
     number = {10},
     year = {2017},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/MM_2017_29_10_a6/}
}
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G. N. Kuvyrkin; I. Yu. Savelyeva; A. V. Zhuravsky. Numerical modelling of vapor phase epitaxy with diffusion processes. Matematičeskoe modelirovanie, Tome 29 (2017) no. 10, pp. 75-85. http://geodesic.mathdoc.fr/item/MM_2017_29_10_a6/