Geodesic
Simulation of RF plasma jet streams at low pressures
Matematičeskoe modelirovanie, Tome 25 (2013) no. 6, pp. 64-71.

Voir la notice de l'article provenant de la source Math-Net.Ru

This paper describes a mathematical model of the flow of RF plasma at a pressure of 13.3–133 Pa in the transition regime at Knudsen $8\cdot10^{-3}\leqslant Kn \leqslant 7\cdot10^{-2}$ for the carrier gas. The model is based on a statistical approach to the neutral component and on continuum model for the electronic and ionic components. The results of calculation of the neutral component of plasma flow in the undisturbed flow and with specimen circumfluence as well a model problem for the electron-ion gas are presented.
Keywords: mathematical modeling, RF plasma, low pressure, jet streams, transient mode, Monte-Carlo method, statistical modeling. 
@article{MM_2013_25_6_a5,
     author = {V. S. Zheltukhin and A. Yu. Shemakhin},
     title = {Simulation of {RF} plasma jet streams at low pressures},
     journal = {Matemati\v{c}eskoe modelirovanie},
     pages = {64--71},
     publisher = {mathdoc},
     volume = {25},
     number = {6},
     year = {2013},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/MM_2013_25_6_a5/}
}
TY  - JOUR
AU  - V. S. Zheltukhin
AU  - A. Yu. Shemakhin
TI  - Simulation of RF plasma jet streams at low pressures
JO  - Matematičeskoe modelirovanie
PY  - 2013
SP  - 64
EP  - 71
VL  - 25
IS  - 6
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/MM_2013_25_6_a5/
LA  - ru
ID  - MM_2013_25_6_a5
ER  - 
%0 Journal Article
%A V. S. Zheltukhin
%A A. Yu. Shemakhin
%T Simulation of RF plasma jet streams at low pressures
%J Matematičeskoe modelirovanie
%D 2013
%P 64-71
%V 25
%N 6
%I mathdoc
%U http://geodesic.mathdoc.fr/item/MM_2013_25_6_a5/
%G ru
%F MM_2013_25_6_a5
V. S. Zheltukhin; A. Yu. Shemakhin. Simulation of RF plasma jet streams at low pressures. Matematičeskoe modelirovanie, Tome 25 (2013) no. 6, pp. 64-71. http://geodesic.mathdoc.fr/item/MM_2013_25_6_a5/

[1] Abdullin I. Sh., Zheltukhin V. S., Sagbiev I. R., Shaekhov M. F., Modifikatsiya nanosloev v vysokochastotnoi plazme ponizhennogo davleniya, monografiya, Izd-vo Kazan. gos. tekhnol. un-ta, Kazan, 2007, 356 pp.

[2] Belotserkovskii O. M., Chislennoe modelirovanie v mekhanike sploshnykh sred, Nauka. Glavnaya redaktsiya fiziko-matematicheskoi literatury, M., 1984, 518 pp. | MR

[3] Bird G. A., Molecular Gas Dynamics and the Direct Simulation of Gas Flows, Oxford University Press, 1994, 476 pp. | MR

[4] Dulov V. G., Lukyanov G. A., Gazodinamika protsessov istecheniya, Nauka, M., 1984, 234 pp.

[5] Pechatnikov Yu. M., “Fizicheskie yavleniya i protsessy perekhodnogo techeniya razrezhennogo gaza”, Prikladnaya fizika, 2004, no. 2, 19–25