Geodesic
On self-organization processes of nanostructures on semiconductor surface by ion bombardment
Matematičeskoe modelirovanie, Tome 24 (2012) no. 12, pp. 23-28.

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The nanostructures self-organization process on semiconductor surfaces are considered. The mathematical model is formulated and numerical modeling of this process is carried out. The influence of high order terms on the evolution of surface morphology is studied. The defects of the surface morphology after oblique ion bombardment are classified.
Keywords: ion bombardment, dissipation, self-organization, substrate.
Mots-clés : nanostructure 
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N. A. Kudryashov; P. N. Ryabov; T. E. Fedyanin. On self-organization processes of nanostructures on semiconductor surface by ion bombardment. Matematičeskoe modelirovanie, Tome 24 (2012) no. 12, pp. 23-28. http://geodesic.mathdoc.fr/item/MM_2012_24_12_a3/

[1] Kudryashov N. A., Migita A. V., “Periodicheskie struktury, voznikayuschie pri uchete dispersii v odnoi iz modelei turbulentnosti”, Izv. RAN. Mekhanika zhidkosti i gaza, 2007, 145 | MR | Zbl

[2] Kudryashov N. A., Ryabov P. N., “Svoistva nelineinykh voln v aktivno-dissipativnoi dispersionnoi srede”, Izv. RAN. Mekhanika zhidkosti i gaza, 2011, no. 3, 97–105 | Zbl

[3] Kudryashov N. A., Ryabov P. N., Sinelshchikov D. I., “Nonlinear waves in media with fifth order dispersion”, Physics Letters A, 375 (2011), 2051–2055 | DOI | MR | Zbl

[4] Carter G., “Effect of surface-height derivative processes on ion-bombardment induced ripple formation”, Physics Review B, 59 (1999), 1669 | DOI

[5] Garo R., Vazquez L., Cuerno R., “Production of ordered silicon nanocrystals by low-energy ion sputtering”, Applied Physics Letters, 78 (2001), 3316 | DOI

[6] Sigmund P., “A mechanism of surface micro-roughening by ion bombardment”, Journal of Materials Science, 89 (1973), 1545 | DOI

[7] Makeev M., Cuerno R., Barabasi A.-L., “Morphology of ion-sputtered surfaces”, Nuclear Instruments and Methods in Physics Research B, 197 (2002), 185 | DOI

[8] Kudryashov N. A., Ryabov P. N., Fedyanin T. E., “Osobennosti samoorganizatsii nanostruktur na poverkhnosti poluprovodnikov pri ionnoi bombardirovke”, Sovremennye problemy prikladnoi matematiki i informatiki (MPAMCS'2012), Tezisy dokladov mezhdunarodnoi molodezhnoi konferentsii-shkoly (Dubna, 22–27 avgusta, 2012), OIYaI, Dubna, 2012, 230