Geodesic
Numerical simulation of the $\alpha$-Si:H film groth process in PECVD reactors
Matematičeskoe modelirovanie, Tome 16 (2004) no. 6, pp. 28-30 Cet article a éte moissonné depuis la source Math-Net.Ru

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     author = {Yu. E. Gorbachev and M. A. Zatevakhin and A. A. Ignatyev},
     title = {Numerical simulation of the $\alpha${-Si:H} film groth process in {PECVD} reactors},
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Yu. E. Gorbachev; M. A. Zatevakhin; A. A. Ignatyev. Numerical simulation of the $\alpha$-Si:H film groth process in PECVD reactors. Matematičeskoe modelirovanie, Tome 16 (2004) no. 6, pp. 28-30. http://geodesic.mathdoc.fr/item/MM_2004_16_6_a5/

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