Numerical simulation of the $\alpha$-Si:H film groth process in PECVD reactors

Yu. E. Gorbachev; M. A. Zatevakhin; A. A. Ignatyev

Geodesic

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Numerical simulation of the $\alpha$-Si:H film groth process in PECVD reactors

Yu. E. Gorbachev ; M. A. Zatevakhin ; A. A. Ignatyev

Matematičeskoe modelirovanie, Tome 16 (2004) no. 6, pp. 28-30

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@article{MM_2004_16_6_a5,
     author = {Yu. E. Gorbachev and M. A. Zatevakhin and A. A. Ignatyev},
     title = {Numerical simulation of the $\alpha${-Si:H} film groth process in {PECVD} reactors},
     journal = {Matemati\v{c}eskoe modelirovanie},
     pages = {28--30},
     publisher = {mathdoc},
     volume = {16},
     number = {6},
     year = {2004},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/MM_2004_16_6_a5/}
}

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AU  - M. A. Zatevakhin
AU  - A. A. Ignatyev
TI  - Numerical simulation of the $\alpha$-Si:H film groth process in PECVD reactors
JO  - Matematičeskoe modelirovanie
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%A M. A. Zatevakhin
%A A. A. Ignatyev
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%J Matematičeskoe modelirovanie
%D 2004
%P 28-30
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%F MM_2004_16_6_a5

Yu. E. Gorbachev; M. A. Zatevakhin; A. A. Ignatyev. Numerical simulation of the $\alpha$-Si:H film groth process in PECVD reactors. Matematičeskoe modelirovanie, Tome 16 (2004) no. 6, pp. 28-30. http://geodesic.mathdoc.fr/item/MM_2004_16_6_a5/