Mathematical model of capacitive discharge with ion-neutral collisions
Matematičeskoe modelirovanie, Tome 13 (2001) no. 11, pp. 3-12
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The mathematical model of low frequency capacitively coupled gas discharge with ion-neutral collisions is developed. The algorithm of its numerical solution is proposed. The results of numerical calculations for different plasma parameters are given. The main discharge characteristics, viz. potential profile and ion distribution function, are obtained.
@article{MM_2001_13_11_a0,
author = {A. G. Shishkin},
title = {Mathematical model of capacitive discharge with ion-neutral collisions},
journal = {Matemati\v{c}eskoe modelirovanie},
pages = {3--12},
year = {2001},
volume = {13},
number = {11},
language = {ru},
url = {http://geodesic.mathdoc.fr/item/MM_2001_13_11_a0/}
}
A. G. Shishkin. Mathematical model of capacitive discharge with ion-neutral collisions. Matematičeskoe modelirovanie, Tome 13 (2001) no. 11, pp. 3-12. http://geodesic.mathdoc.fr/item/MM_2001_13_11_a0/