Analysis of light scattering by hole in a film by discrete sources method
Matematičeskoe modelirovanie, Tome 10 (1998) no. 5, pp. 81-90
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The paper is devoted to analysis of the light scattering by the hole in a film deposited on silicon substrate. To realize numerical modelling it is suggested to employ Discrete Sources Method. The constructing of the approximate solution is examined. Computer simulating results are discussed.
@article{MM_1998_10_5_a8,
author = {N. V. Grishina and Yu. A. Eremin},
title = {Analysis of light scattering by hole in a~film by discrete sources method},
journal = {Matemati\v{c}eskoe modelirovanie},
pages = {81--90},
year = {1998},
volume = {10},
number = {5},
language = {ru},
url = {http://geodesic.mathdoc.fr/item/MM_1998_10_5_a8/}
}
N. V. Grishina; Yu. A. Eremin. Analysis of light scattering by hole in a film by discrete sources method. Matematičeskoe modelirovanie, Tome 10 (1998) no. 5, pp. 81-90. http://geodesic.mathdoc.fr/item/MM_1998_10_5_a8/