The numerical simulation of the coupled impurity and point defects diffusion in silicon
Matematičeskoe modelirovanie, Tome 7 (1995) no. 8, pp. 60-74
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The numerical algorithm for the solution of the systems of the nonlinear equations of multiparticles diffusion in two dimensions is proposed. The algorithm is based on the construting of additive pure implicit difference schemes. The results of the computing experiments are adduced.
@article{MM_1995_7_8_a3,
author = {V. A. Zhuk and V. A. Tsurko},
title = {The numerical simulation of the coupled impurity and point defects diffusion in silicon},
journal = {Matemati\v{c}eskoe modelirovanie},
pages = {60--74},
year = {1995},
volume = {7},
number = {8},
language = {ru},
url = {http://geodesic.mathdoc.fr/item/MM_1995_7_8_a3/}
}
V. A. Zhuk; V. A. Tsurko. The numerical simulation of the coupled impurity and point defects diffusion in silicon. Matematičeskoe modelirovanie, Tome 7 (1995) no. 8, pp. 60-74. http://geodesic.mathdoc.fr/item/MM_1995_7_8_a3/