Geodesic
Efficient algorithm of the calculation of diffusion in silison during lokal oxidation
Matematičeskoe modelirovanie, Tome 5 (1993) no. 3, pp. 84-96 Cet article a éte moissonné depuis la source Math-Net.Ru

Voir la notice de l'article

A mathematical model of the diffusion of multiple impurity species in silicon during local oxidation is discussed. The model describes the redistribution of the dopand atoms which is effected by diffusion and electric field. A numerical method based on the coordinated splitting of the parabolic differential equations and boundary conditions is proposed. Local onedimensional difference schemes are constructed. The calculations are performed in twodimensional domain with moving boundary. 
@article{MM_1993_5_3_a4,
     author = {V. A. Zhuk and V. A. Tsurko},
     title = {Efficient algorithm of the calculation of diffusion in silison during lokal oxidation},
     journal = {Matemati\v{c}eskoe modelirovanie},
     pages = {84--96},
     year = {1993},
     volume = {5},
     number = {3},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/MM_1993_5_3_a4/}
}
TY  - JOUR
AU  - V. A. Zhuk
AU  - V. A. Tsurko
TI  - Efficient algorithm of the calculation of diffusion in silison during lokal oxidation
JO  - Matematičeskoe modelirovanie
PY  - 1993
SP  - 84
EP  - 96
VL  - 5
IS  - 3
UR  - http://geodesic.mathdoc.fr/item/MM_1993_5_3_a4/
LA  - ru
ID  - MM_1993_5_3_a4
ER  - 
%0 Journal Article
%A V. A. Zhuk
%A V. A. Tsurko
%T Efficient algorithm of the calculation of diffusion in silison during lokal oxidation
%J Matematičeskoe modelirovanie
%D 1993
%P 84-96
%V 5
%N 3
%U http://geodesic.mathdoc.fr/item/MM_1993_5_3_a4/
%G ru
%F MM_1993_5_3_a4
V. A. Zhuk; V. A. Tsurko. Efficient algorithm of the calculation of diffusion in silison during lokal oxidation. Matematičeskoe modelirovanie, Tome 5 (1993) no. 3, pp. 84-96. http://geodesic.mathdoc.fr/item/MM_1993_5_3_a4/