Mathematical modeling of $\mathrm{GaAs}/\mathrm{AlGaAs}$ structures growth processes in flow gas-epitacsial reactors
Matematičeskoe modelirovanie, Tome 2 (1990) no. 7, pp. 62-84
Cet article a éte moissonné depuis la source Math-Net.Ru
The survey of mathematical models used for numerical investigation of stationary and nonstationary processes in flow gas-epitaxial reactors is given. The models of flow as well as models of mass transfer for structure growing in Al-Ga-As systems are considered.
@article{MM_1990_2_7_a5,
author = {A. I. Zhmakin and Yu. N. Makarov},
title = {Mathematical modeling of $\mathrm{GaAs}/\mathrm{AlGaAs}$ structures growth processes in flow gas-epitacsial reactors},
journal = {Matemati\v{c}eskoe modelirovanie},
pages = {62--84},
year = {1990},
volume = {2},
number = {7},
language = {ru},
url = {http://geodesic.mathdoc.fr/item/MM_1990_2_7_a5/}
}
TY - JOUR
AU - A. I. Zhmakin
AU - Yu. N. Makarov
TI - Mathematical modeling of $\mathrm{GaAs}/\mathrm{AlGaAs}$ structures growth processes in flow gas-epitacsial reactors
JO - Matematičeskoe modelirovanie
PY - 1990
SP - 62
EP - 84
VL - 2
IS - 7
UR - http://geodesic.mathdoc.fr/item/MM_1990_2_7_a5/
LA - ru
ID - MM_1990_2_7_a5
ER -
%0 Journal Article
%A A. I. Zhmakin
%A Yu. N. Makarov
%T Mathematical modeling of $\mathrm{GaAs}/\mathrm{AlGaAs}$ structures growth processes in flow gas-epitacsial reactors
%J Matematičeskoe modelirovanie
%D 1990
%P 62-84
%V 2
%N 7
%U http://geodesic.mathdoc.fr/item/MM_1990_2_7_a5/
%G ru
%F MM_1990_2_7_a5
A. I. Zhmakin; Yu. N. Makarov. Mathematical modeling of $\mathrm{GaAs}/\mathrm{AlGaAs}$ structures growth processes in flow gas-epitacsial reactors. Matematičeskoe modelirovanie, Tome 2 (1990) no. 7, pp. 62-84. http://geodesic.mathdoc.fr/item/MM_1990_2_7_a5/