Features of the metallization influence on phase velocities of acoustic waves in piezoelectric plates
Žurnal Sibirskogo federalʹnogo universiteta. Matematika i fizika, Tome 12 (2019) no. 6, pp. 718-727.

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The paper presents an analysis of the influence of the load represented by two metal layers on the change in the phase velocity of the dispersion modes of the elastic Lamb and $SH$-waves in "Me/ZnO/Me" and "Me/AlN/Me" structures depending on the elastic wave frequency and the ratio of the metal layer to the piezoelectric layer thickness. Aluminum (Al), molybdenum (Mo) and platinum (Pt) are considered as the metal layer materials (Me). Only the elastic Lamb wave modes have localized maxima of the sensitivity curve $S$ for all types of structures. Systems with low values of acoustic impedances for layers and plates materials have maximum values of $S$ for metallization with thin layers, and also have minimal differences in the profiles of the components of the displacement vectors of the elastic wave. Systems with the most different values of acoustic impedances of layers and plates materials have maximum values of $S$ when metallized with thick layers, and also have maximum differences in the profiles of the components of the displacement vectors of the elastic wave.
Keywords: piezoelectric plate, Lamb wave, $SH$-wave, mass loading, computer simulation.
@article{JSFU_2019_12_6_a7,
     author = {Olga P. Zolotova and Sergey I. Burkov},
     title = {Features of the metallization influence on phase velocities of acoustic waves in piezoelectric plates},
     journal = {\v{Z}urnal Sibirskogo federalʹnogo universiteta. Matematika i fizika},
     pages = {718--727},
     publisher = {mathdoc},
     volume = {12},
     number = {6},
     year = {2019},
     language = {en},
     url = {http://geodesic.mathdoc.fr/item/JSFU_2019_12_6_a7/}
}
TY  - JOUR
AU  - Olga P. Zolotova
AU  - Sergey I. Burkov
TI  - Features of the metallization influence on phase velocities of acoustic waves in piezoelectric plates
JO  - Žurnal Sibirskogo federalʹnogo universiteta. Matematika i fizika
PY  - 2019
SP  - 718
EP  - 727
VL  - 12
IS  - 6
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/JSFU_2019_12_6_a7/
LA  - en
ID  - JSFU_2019_12_6_a7
ER  - 
%0 Journal Article
%A Olga P. Zolotova
%A Sergey I. Burkov
%T Features of the metallization influence on phase velocities of acoustic waves in piezoelectric plates
%J Žurnal Sibirskogo federalʹnogo universiteta. Matematika i fizika
%D 2019
%P 718-727
%V 12
%N 6
%I mathdoc
%U http://geodesic.mathdoc.fr/item/JSFU_2019_12_6_a7/
%G en
%F JSFU_2019_12_6_a7
Olga P. Zolotova; Sergey I. Burkov. Features of the metallization influence on phase velocities of acoustic waves in piezoelectric plates. Žurnal Sibirskogo federalʹnogo universiteta. Matematika i fizika, Tome 12 (2019) no. 6, pp. 718-727. http://geodesic.mathdoc.fr/item/JSFU_2019_12_6_a7/

[1] Q. Xie, S. Mezil, P.H. Otsuka et. al., Imaging Gigahertz Zero-Group-Velocity Lamb Waves, arXiv: 1901.01013 [physics.app-ph]

[2] V. Yantchev, I. Katardjiev, “Thin film Lamb wave resonators in frequency control and sensing applications: a review”, Journal of Micromechanics and Microengineering, 23 (2013), 043001, 14 pp. | DOI

[3] T. Nakamoto, T. Moriizumi, “A theory of a Quartz Crystal Microbalance Based Upon a Mason Equivalent Circuit”, Japanese Journal of Applied Physics, Part 1 (Regular Papers $\$ Short Notes), 29 (1990), 963–969 | DOI

[4] B.P. Sorokin, G.M. Kvashnin, A.V. Telichko, A.S. Novoselov, S.I. Burkov, “Lamb Waves Dispersion Curves for Diamond Based Piezoelectric Layered Structure”, Applied Physics Letters, 108:5 (2016), 113501 | DOI

[5] G.D. Mansfeld, S.G. Alekseev, I.M. Kotelyansky, “Acoustic HBAR Spectroscopy of Metal (W, Ti, Mo, Al) Thin Films”, Proc. Ultras. Symp., IEEE, 2001, 415–418

[6] Z. Zhang, Z. Wen, C. Wang, “Investigation of Surface Acoustic Waves Propagating in ZnO–SiO$_2$–Si Multilayer Structure”, Ultrasonics, 53:2 (2013), 363–368 | DOI

[7] K. Tsubouchi, K. Sugai, N. Mikoshiba, “AlN material constants evaluation and SAW properties on AlN/Al$_2$O$_3$ and AlN/Si”, Proc. IEEE Ultrason. Symp. (Chicago, USA, 1981), 375–380

[8] R.E. Macfarlane, J.A. Rayne, C.K. Jones, “Anomalous temperature dependence of shear modulus C44 for platinum”, Physics Letters, 18:2 (1965), 91–92 | DOI

[9] G.W. Farnell, Acoustic Surface Waves, Topics in Applied Physics, ed. A. A. Oliner, 1978

[10] B.P. Sorokin, G.M. Kvashnin, A.V. Telichko, S.I. Burkov, V.D. Blank, “Piezoelectric-Layered Structures Based on Synthetic Diamond”, InTech: Piezoelectric Materials, ed. Toshio Ogawa, 2016, 161–199

[11] S.I. Burkov, O.P. Zolotova, B.P. Sorokin, “Analysis of the metal layer thickness influence on the dispersion characteristics of acoustic waves propagating in the layered piezoelectric structure “Me/AlN/Me/diamond””, Ultrasonics, 83 (2018), 188–193 | DOI

[12] I.E. Kuznetsova, B.D. Zaitsev, S.G. Joshi, A.S. Kuznetsova, “Gravimetric Sensitivity of Acoustic Waves in Thin Piezoelectric Plates in the Presence of Liquids”, Techn. Phys. Lett., 32 (2006), 729–731 | DOI

[13] S.I. Burkov, O.P. Zolotova, B.P. Sorokin, P.P. Turchin, V.S. Talismanov, “Features of acoustic wave propagation in the Me/ZnO/Me/diamond waveguide structure”, The Journal of the Acoustical Society of America, 143 (2018), 16–22 | DOI

[14] O.P. Zolotova, S.I. Burkov, “Simulation of metal layers thickness influence on phase velocities of acoustic waves in the piezoelectric plates”, Siberian Journal of Science and Technology, 19 (2018), 396–404 | DOI