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@article{JSFU_2010_3_1_a11, author = {Alexander V. Efremov and Sergey G. Ovchinnikov and Sergey N. Varnakov and Nikolay N. Kosyrev}, title = {Ellipsometer {Mounting} {System} {Design} {Using} {CAD}}, journal = {\v{Z}urnal Sibirskogo federalʹnogo universiteta. Matematika i fizika}, pages = {118--124}, publisher = {mathdoc}, volume = {3}, number = {1}, year = {2010}, language = {ru}, url = {http://geodesic.mathdoc.fr/item/JSFU_2010_3_1_a11/} }
TY - JOUR AU - Alexander V. Efremov AU - Sergey G. Ovchinnikov AU - Sergey N. Varnakov AU - Nikolay N. Kosyrev TI - Ellipsometer Mounting System Design Using CAD JO - Žurnal Sibirskogo federalʹnogo universiteta. Matematika i fizika PY - 2010 SP - 118 EP - 124 VL - 3 IS - 1 PB - mathdoc UR - http://geodesic.mathdoc.fr/item/JSFU_2010_3_1_a11/ LA - ru ID - JSFU_2010_3_1_a11 ER -
%0 Journal Article %A Alexander V. Efremov %A Sergey G. Ovchinnikov %A Sergey N. Varnakov %A Nikolay N. Kosyrev %T Ellipsometer Mounting System Design Using CAD %J Žurnal Sibirskogo federalʹnogo universiteta. Matematika i fizika %D 2010 %P 118-124 %V 3 %N 1 %I mathdoc %U http://geodesic.mathdoc.fr/item/JSFU_2010_3_1_a11/ %G ru %F JSFU_2010_3_1_a11
Alexander V. Efremov; Sergey G. Ovchinnikov; Sergey N. Varnakov; Nikolay N. Kosyrev. Ellipsometer Mounting System Design Using CAD. Žurnal Sibirskogo federalʹnogo universiteta. Matematika i fizika, Tome 3 (2010) no. 1, pp. 118-124. http://geodesic.mathdoc.fr/item/JSFU_2010_3_1_a11/