Ellipsometer Mounting System Design Using CAD
Žurnal Sibirskogo federalʹnogo universiteta. Matematika i fizika, Tome 3 (2010) no. 1, pp. 118-124.

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Ellipsometer arms mounting is a part of MBE system with magneto-optic ellipsometric complex, for which the automated designing task has been examined. The ability of the limiting conditions driven design has been shown. Using CAD and mathematical modeling the optimal form of ellipsometer mounting arms was found. The acceleration that appears under typical mechanical overloads has been defined, under the condition that the maximum beam deviation of the analyzer did not exceed the admissible deviation for carrying out measurements.
Keywords: CAD, mathematical modeling, ellipsometer, overload modeling, finite element method.
@article{JSFU_2010_3_1_a11,
     author = {Alexander V. Efremov and Sergey G. Ovchinnikov and Sergey N. Varnakov and Nikolay N. Kosyrev},
     title = {Ellipsometer {Mounting} {System} {Design} {Using} {CAD}},
     journal = {\v{Z}urnal Sibirskogo federalʹnogo universiteta. Matematika i fizika},
     pages = {118--124},
     publisher = {mathdoc},
     volume = {3},
     number = {1},
     year = {2010},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/JSFU_2010_3_1_a11/}
}
TY  - JOUR
AU  - Alexander V. Efremov
AU  - Sergey G. Ovchinnikov
AU  - Sergey N. Varnakov
AU  - Nikolay N. Kosyrev
TI  - Ellipsometer Mounting System Design Using CAD
JO  - Žurnal Sibirskogo federalʹnogo universiteta. Matematika i fizika
PY  - 2010
SP  - 118
EP  - 124
VL  - 3
IS  - 1
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/JSFU_2010_3_1_a11/
LA  - ru
ID  - JSFU_2010_3_1_a11
ER  - 
%0 Journal Article
%A Alexander V. Efremov
%A Sergey G. Ovchinnikov
%A Sergey N. Varnakov
%A Nikolay N. Kosyrev
%T Ellipsometer Mounting System Design Using CAD
%J Žurnal Sibirskogo federalʹnogo universiteta. Matematika i fizika
%D 2010
%P 118-124
%V 3
%N 1
%I mathdoc
%U http://geodesic.mathdoc.fr/item/JSFU_2010_3_1_a11/
%G ru
%F JSFU_2010_3_1_a11
Alexander V. Efremov; Sergey G. Ovchinnikov; Sergey N. Varnakov; Nikolay N. Kosyrev. Ellipsometer Mounting System Design Using CAD. Žurnal Sibirskogo federalʹnogo universiteta. Matematika i fizika, Tome 3 (2010) no. 1, pp. 118-124. http://geodesic.mathdoc.fr/item/JSFU_2010_3_1_a11/

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