Geodesic
Analysis of inhomogeneities on wafers by the integral transform method
Differencialʹnye uravneniâ, Tome 36 (2000) no. 9, pp. 1238-1247.

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@article{DE_2000_36_9_a8,
     author = {Yu. A. Eremin and V. I. Ivakhnenko},
     title = {Analysis of inhomogeneities on wafers by the integral transform method},
     journal = {Differencialʹnye uravneni\^a},
     pages = {1238--1247},
     publisher = {mathdoc},
     volume = {36},
     number = {9},
     year = {2000},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/DE_2000_36_9_a8/}
}
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Yu. A. Eremin; V. I. Ivakhnenko. Analysis of inhomogeneities on wafers by the integral transform method. Differencialʹnye uravneniâ, Tome 36 (2000) no. 9, pp. 1238-1247. http://geodesic.mathdoc.fr/item/DE_2000_36_9_a8/