Analysis of inhomogeneities on wafers by the integral transform method
Differencialʹnye uravneniâ, Tome 36 (2000) no. 9, pp. 1238-1247
Cet article a éte moissonné depuis la source Math-Net.Ru
@article{DE_2000_36_9_a8,
author = {Yu. A. Eremin and V. I. Ivakhnenko},
title = {Analysis of inhomogeneities on wafers by the integral transform method},
journal = {Differencialʹnye uravneni\^a},
pages = {1238--1247},
year = {2000},
volume = {36},
number = {9},
language = {ru},
url = {http://geodesic.mathdoc.fr/item/DE_2000_36_9_a8/}
}
Yu. A. Eremin; V. I. Ivakhnenko. Analysis of inhomogeneities on wafers by the integral transform method. Differencialʹnye uravneniâ, Tome 36 (2000) no. 9, pp. 1238-1247. http://geodesic.mathdoc.fr/item/DE_2000_36_9_a8/