Geodesic
On the possibility of X-ray projection lithography realization
Doklady Akademii Nauk, Tome 302 (1988) no. 1, pp. 82-85

Voir la notice de l'article provenant de la source Math-Net.Ru

@article{DAN_1988_302_1_a19,
     author = {A. V. Vinogradov and N. N. Zorev},
     title = {On the possibility of {X-ray} projection lithography realization},
     journal = {Doklady Akademii Nauk},
     pages = {82--85},
     publisher = {mathdoc},
     volume = {302},
     number = {1},
     year = {1988},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/DAN_1988_302_1_a19/}
}
TY  - JOUR
AU  - A. V. Vinogradov
AU  - N. N. Zorev
TI  - On the possibility of X-ray projection lithography realization
JO  - Doklady Akademii Nauk
PY  - 1988
SP  - 82
EP  - 85
VL  - 302
IS  - 1
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/DAN_1988_302_1_a19/
LA  - ru
ID  - DAN_1988_302_1_a19
ER  - 
%0 Journal Article
%A A. V. Vinogradov
%A N. N. Zorev
%T On the possibility of X-ray projection lithography realization
%J Doklady Akademii Nauk
%D 1988
%P 82-85
%V 302
%N 1
%I mathdoc
%U http://geodesic.mathdoc.fr/item/DAN_1988_302_1_a19/
%G ru
%F DAN_1988_302_1_a19
A. V. Vinogradov; N. N. Zorev. On the possibility of X-ray projection lithography realization. Doklady Akademii Nauk, Tome 302 (1988) no. 1, pp. 82-85. http://geodesic.mathdoc.fr/item/DAN_1988_302_1_a19/