Semiconductor structure investigation by the methods of acoustic and electron thermoacoustic microscopy

Yu. V. Gulyaev; M. A. Kulakov; A. I. Morosov; E. I. Rau

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Semiconductor structure investigation by the methods of acoustic and electron thermoacoustic microscopy

Yu. V. Gulyaev ; M. A. Kulakov ; A. I. Morosov ; E. I. Rau

Doklady Akademii Nauk, Tome 301 (1988) no. 4, pp. 849-851.

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@article{DAN_1988_301_4_a17,
     author = {Yu. V. Gulyaev and M. A. Kulakov and A. I. Morosov and E. I. Rau},
     title = {Semiconductor structure investigation by the methods of acoustic and electron thermoacoustic microscopy},
     journal = {Doklady Akademii Nauk},
     pages = {849--851},
     publisher = {mathdoc},
     volume = {301},
     number = {4},
     year = {1988},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/DAN_1988_301_4_a17/}
}

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JO  - Doklady Akademii Nauk
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Yu. V. Gulyaev; M. A. Kulakov; A. I. Morosov; E. I. Rau. Semiconductor structure investigation by the methods of acoustic and electron thermoacoustic microscopy. Doklady Akademii Nauk, Tome 301 (1988) no. 4, pp. 849-851. http://geodesic.mathdoc.fr/item/DAN_1988_301_4_a17/