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@article{DAN_1981_257_5_a21,
author = {M. F. Galyautdinov and Yu. K. Danileiko and M. M. Zaripov and A. A. Manenkov and A. V. Sidorin and I. B. Khaibullin and E. I. Shtyrkov},
title = {Annealing of implanted layers of silicon by the pulsed $\mathrm{CO}_2$-laser radiation},
journal = {Doklady Akademii Nauk},
pages = {1110--1113},
publisher = {mathdoc},
volume = {257},
number = {5},
year = {1981},
language = {ru},
url = {http://geodesic.mathdoc.fr/item/DAN_1981_257_5_a21/}
}
TY - JOUR
AU - M. F. Galyautdinov
AU - Yu. K. Danileiko
AU - M. M. Zaripov
AU - A. A. Manenkov
AU - A. V. Sidorin
AU - I. B. Khaibullin
AU - E. I. Shtyrkov
TI - Annealing of implanted layers of silicon by the pulsed $\mathrm{CO}_2$-laser radiation
JO - Doklady Akademii Nauk
PY - 1981
SP - 1110
EP - 1113
VL - 257
IS - 5
PB - mathdoc
UR - http://geodesic.mathdoc.fr/item/DAN_1981_257_5_a21/
LA - ru
ID - DAN_1981_257_5_a21
ER -
%0 Journal Article
%A M. F. Galyautdinov
%A Yu. K. Danileiko
%A M. M. Zaripov
%A A. A. Manenkov
%A A. V. Sidorin
%A I. B. Khaibullin
%A E. I. Shtyrkov
%T Annealing of implanted layers of silicon by the pulsed $\mathrm{CO}_2$-laser radiation
%J Doklady Akademii Nauk
%D 1981
%P 1110-1113
%V 257
%N 5
%I mathdoc
%U http://geodesic.mathdoc.fr/item/DAN_1981_257_5_a21/
%G ru
%F DAN_1981_257_5_a21
M. F. Galyautdinov; Yu. K. Danileiko; M. M. Zaripov; A. A. Manenkov; A. V. Sidorin; I. B. Khaibullin; E. I. Shtyrkov. Annealing of implanted layers of silicon by the pulsed $\mathrm{CO}_2$-laser radiation. Doklady Akademii Nauk, Tome 257 (1981) no. 5, pp. 1110-1113. http://geodesic.mathdoc.fr/item/DAN_1981_257_5_a21/