Geodesic
Effect of excess silicon on the formation of $\alpha$-$\mathrm{Si}_3\mathrm{N}_4$ in the ionic implantation of nitrogen
Doklady Akademii Nauk, Tome 240 (1978) no. 5, pp. 1108-1110.

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@article{DAN_1978_240_5_a21,
     author = {P. V. Pavlov},
     title = {Effect of excess silicon on the formation of $\alpha$-$\mathrm{Si}_3\mathrm{N}_4$ in the ionic implantation of nitrogen},
     journal = {Doklady Akademii Nauk},
     pages = {1108--1110},
     publisher = {mathdoc},
     volume = {240},
     number = {5},
     year = {1978},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/DAN_1978_240_5_a21/}
}
TY  - JOUR
AU  - P. V. Pavlov
TI  - Effect of excess silicon on the formation of $\alpha$-$\mathrm{Si}_3\mathrm{N}_4$ in the ionic implantation of nitrogen
JO  - Doklady Akademii Nauk
PY  - 1978
SP  - 1108
EP  - 1110
VL  - 240
IS  - 5
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/DAN_1978_240_5_a21/
LA  - ru
ID  - DAN_1978_240_5_a21
ER  - 
%0 Journal Article
%A P. V. Pavlov
%T Effect of excess silicon on the formation of $\alpha$-$\mathrm{Si}_3\mathrm{N}_4$ in the ionic implantation of nitrogen
%J Doklady Akademii Nauk
%D 1978
%P 1108-1110
%V 240
%N 5
%I mathdoc
%U http://geodesic.mathdoc.fr/item/DAN_1978_240_5_a21/
%G ru
%F DAN_1978_240_5_a21
P. V. Pavlov. Effect of excess silicon on the formation of $\alpha$-$\mathrm{Si}_3\mathrm{N}_4$ in the ionic implantation of nitrogen. Doklady Akademii Nauk, Tome 240 (1978) no. 5, pp. 1108-1110. http://geodesic.mathdoc.fr/item/DAN_1978_240_5_a21/