On the theory of atomic displacement during ion implantation
Doklady Akademii Nauk, Tome 213 (1973) no. 1, pp. 74-76
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@article{DAN_1973_213_1_a18,
author = {V. V. Yudin},
title = {On the theory of atomic displacement during ion implantation},
journal = {Doklady Akademii Nauk},
pages = {74--76},
publisher = {mathdoc},
volume = {213},
number = {1},
year = {1973},
language = {ru},
url = {http://geodesic.mathdoc.fr/item/DAN_1973_213_1_a18/}
}
V. V. Yudin. On the theory of atomic displacement during ion implantation. Doklady Akademii Nauk, Tome 213 (1973) no. 1, pp. 74-76. http://geodesic.mathdoc.fr/item/DAN_1973_213_1_a18/