Anisotropy of the cathode sputtering coefficient and focussed collisions in single crystals
Doklady Akademii Nauk, Tome 147 (1962) no. 2, pp. 331-333
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@article{DAN_1962_147_2_a17,
author = {M. Balarin and V. A. Molchanov and V. G. Telkovski},
title = {Anisotropy of the cathode sputtering coefficient and focussed collisions in single crystals},
journal = {Doklady Akademii Nauk},
pages = {331--333},
publisher = {mathdoc},
volume = {147},
number = {2},
year = {1962},
language = {ru},
url = {http://geodesic.mathdoc.fr/item/DAN_1962_147_2_a17/}
}
TY - JOUR AU - M. Balarin AU - V. A. Molchanov AU - V. G. Telkovski TI - Anisotropy of the cathode sputtering coefficient and focussed collisions in single crystals JO - Doklady Akademii Nauk PY - 1962 SP - 331 EP - 333 VL - 147 IS - 2 PB - mathdoc UR - http://geodesic.mathdoc.fr/item/DAN_1962_147_2_a17/ LA - ru ID - DAN_1962_147_2_a17 ER -
%0 Journal Article %A M. Balarin %A V. A. Molchanov %A V. G. Telkovski %T Anisotropy of the cathode sputtering coefficient and focussed collisions in single crystals %J Doklady Akademii Nauk %D 1962 %P 331-333 %V 147 %N 2 %I mathdoc %U http://geodesic.mathdoc.fr/item/DAN_1962_147_2_a17/ %G ru %F DAN_1962_147_2_a17
M. Balarin; V. A. Molchanov; V. G. Telkovski. Anisotropy of the cathode sputtering coefficient and focussed collisions in single crystals. Doklady Akademii Nauk, Tome 147 (1962) no. 2, pp. 331-333. http://geodesic.mathdoc.fr/item/DAN_1962_147_2_a17/