Etching Effects of Low Temperature Hydrogen plasma on encapsulated diamond transistors
Acta Universitatis Carolinae. Mathematica et Physica, Tome 53 (2012) no. 2, pp. 97-103
Cet article a éte moissonné depuis la source Czech Digital Mathematics Library
@article{AUCMP_2012_53_2_a10,
author = {Kr\'atk\'a, N. and Neykova, N. and Kromka, A and Rezek, B.},
title = {Etching {Effects} of {Low} {Temperature} {Hydrogen} plasma on encapsulated diamond transistors},
journal = {Acta Universitatis Carolinae. Mathematica et Physica},
pages = {97--103},
year = {2012},
volume = {53},
number = {2},
language = {en},
url = {http://geodesic.mathdoc.fr/item/AUCMP_2012_53_2_a10/}
}
TY - JOUR AU - Krátká, N. AU - Neykova, N. AU - Kromka, A AU - Rezek, B. TI - Etching Effects of Low Temperature Hydrogen plasma on encapsulated diamond transistors JO - Acta Universitatis Carolinae. Mathematica et Physica PY - 2012 SP - 97 EP - 103 VL - 53 IS - 2 UR - http://geodesic.mathdoc.fr/item/AUCMP_2012_53_2_a10/ LA - en ID - AUCMP_2012_53_2_a10 ER -
%0 Journal Article %A Krátká, N. %A Neykova, N. %A Kromka, A %A Rezek, B. %T Etching Effects of Low Temperature Hydrogen plasma on encapsulated diamond transistors %J Acta Universitatis Carolinae. Mathematica et Physica %D 2012 %P 97-103 %V 53 %N 2 %U http://geodesic.mathdoc.fr/item/AUCMP_2012_53_2_a10/ %G en %F AUCMP_2012_53_2_a10
Krátká, N.; Neykova, N.; Kromka, A; Rezek, B. Etching Effects of Low Temperature Hydrogen plasma on encapsulated diamond transistors. Acta Universitatis Carolinae. Mathematica et Physica, Tome 53 (2012) no. 2, pp. 97-103. http://geodesic.mathdoc.fr/item/AUCMP_2012_53_2_a10/