@article{VYURV_2012_1_a1, author = {Yu. Boldyrev and K. Zamotin and E. Petukhov}, title = {Modeling of chemical vapor deposition for growth of thin films}, journal = {Vestnik \^U\v{z}no-Uralʹskogo gosudarstvennogo universiteta. Seri\^a Vy\v{c}islitelʹna\^a matematika i informatika}, pages = {19--30}, year = {2012}, number = {1}, language = {ru}, url = {http://geodesic.mathdoc.fr/item/VYURV_2012_1_a1/} }