TY  - JOUR
AU  - A. A. Adamov
AU  - V. N. Khramov
TI  - Evaluation of the possibility of applying the method of the laser triangulation to measurement of thin film thickness
JO  - Matematičeskaâ fizika i kompʹûternoe modelirovanie
PY  - 2017
SP  - 83
EP  - 94
VL  - 20
IS  - 4
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/VVGUM_2017_20_4_a8/
LA  - ru
ID  - VVGUM_2017_20_4_a8
ER  -