TY  - JOUR
AU  - A. A. Lyakhov
AU  - V. I. Strunin
TI  - Numerical analysis of the kinetics of chemical reactions in an argon-silane plasma of the glow discharge
JO  - Vestnik Tomskogo gosudarstvennogo universiteta. Matematika i mehanika
PY  - 2017
SP  - 79
EP  - 89
IS  - 50
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/VTGU_2017_50_a6/
LA  - ru
ID  - VTGU_2017_50_a6
ER  -