TY  - JOUR
AU  - V. I. Chepurnov
AU  - K. P. Sivakova
AU  - A. A. Ermoshkin
TI  - Peculiarities of nanopoint damage process in the structure of \emph{por-SiC/Si}, obtained by diffusion technology for chemical sensors
JO  - Vestnik Samarskogo universiteta. Estestvennonaučnaâ seriâ
PY  - 2011
SP  - 179
EP  - 183
IS  - 2
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/VSGU_2011_2_a17/
LA  - ru
ID  - VSGU_2011_2_a17
ER  -