%0 Journal Article
%A V. I. Chepurnov
%A K. P. Sivakova
%A A. A. Ermoshkin
%T Peculiarities of nanopoint damage process in the structure of por-SiC/Si, obtained by diffusion technology for chemical sensors
%J Vestnik Samarskogo universiteta. Estestvennonaučnaâ seriâ
%D 2011
%P 179-183
%N 2
%U http://geodesic.mathdoc.fr/item/VSGU_2011_2_a17/
%G ru
%F VSGU_2011_2_a17