@article{VSGU_2011_2_a17,
     author = {V. I. Chepurnov and K. P. Sivakova and A. A. Ermoshkin},
     title = {Peculiarities of nanopoint damage process in the structure of {\emph{por-SiC/Si},} obtained by diffusion technology for chemical sensors},
     journal = {Vestnik Samarskogo universiteta. Estestvennonau\v{c}na\^a seri\^a},
     pages = {179--183},
     publisher = {mathdoc},
     number = {2},
     year = {2011},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/VSGU_2011_2_a17/}
}