@article{VSGU_2011_2_a17, author = {V. I. Chepurnov and K. P. Sivakova and A. A. Ermoshkin}, title = {Peculiarities of nanopoint damage process in the structure of {por-SiC/Si,} obtained by diffusion technology for chemical sensors}, journal = {Vestnik Samarskogo universiteta. Estestvennonau\v{c}na\^a seri\^a}, pages = {179--183}, year = {2011}, number = {2}, language = {ru}, url = {http://geodesic.mathdoc.fr/item/VSGU_2011_2_a17/} }