TY - JOUR AU - A. V. Tikhonravov AU - I. V. Kochikov AU - T. V. Amochkina AU - F. V. Grigor'ev AU - O. A. Kondakova AU - V. B. Sulimov TI - High performance modeling of modern deposition processes for optical coating nanotechnology JO - Numerical methods and programming PY - 2012 SP - 491 EP - 496 VL - 13 IS - 4 PB - mathdoc UR - http://geodesic.mathdoc.fr/item/VMP_2012_13_4_a1/ LA - ru ID - VMP_2012_13_4_a1 ER -