TY  - JOUR
AU  - G. A. Tarnavskii
TI  - A mathematical simulation of implantation processes of doping donor and acceptor impurities in a silicon wafer
JO  - Numerical methods and programming
PY  - 2009
SP  - 363
EP  - 370
VL  - 10
IS  - 3
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/VMP_2009_10_3_a10/
LA  - ru
ID  - VMP_2009_10_3_a10
ER  -