%0 Journal Article
%A G. A. Tarnavskii
%T A mathematical simulation of implantation processes of doping donor and acceptor impurities in a silicon wafer
%J Numerical methods and programming
%D 2009
%P 363-370
%V 10
%N 3
%I mathdoc
%U http://geodesic.mathdoc.fr/item/VMP_2009_10_3_a10/
%G ru
%F VMP_2009_10_3_a10