@article{VMP_2009_10_3_a10,
     author = {G. A. Tarnavskii},
     title = {A mathematical simulation of implantation processes of doping donor and acceptor impurities in a silicon wafer},
     journal = {Numerical methods and programming},
     pages = {363--370},
     publisher = {mathdoc},
     volume = {10},
     number = {3},
     year = {2009},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/VMP_2009_10_3_a10/}
}