TY - JOUR AU - V. S. Zheltukhin AU - M. S. Fadeeva AU - V. Ju. Chebakova TI - Modification of the Scharfetter–Gummel method for calculating the flux of charged particles for simulation of a radio-frequency capacitive coupled discharge JO - Učënye zapiski Kazanskogo universiteta. Seriâ Fiziko-matematičeskie nauki PY - 2017 SP - 444 EP - 457 VL - 159 IS - 4 PB - mathdoc UR - http://geodesic.mathdoc.fr/item/UZKU_2017_159_4_a2/ LA - ru ID - UZKU_2017_159_4_a2 ER -