%0 Journal Article
%A V. S. Zheltukhin
%A M. S. Fadeeva
%A V. Ju. Chebakova
%T Modification of the Scharfetter–Gummel method for calculating the flux of charged particles for simulation of a radio-frequency capacitive coupled discharge
%J Učënye zapiski Kazanskogo universiteta. Seriâ Fiziko-matematičeskie nauki
%D 2017
%P 444-457
%V 159
%N 4
%I mathdoc
%U http://geodesic.mathdoc.fr/item/UZKU_2017_159_4_a2/
%G ru
%F UZKU_2017_159_4_a2