@article{UZKU_2017_159_4_a2, author = {V. S. Zheltukhin and M. S. Fadeeva and V. Ju. Chebakova}, title = {Modification of the {Scharfetter{\textendash}Gummel} method for calculating the flux of charged particles for simulation of a~radio-frequency capacitive coupled discharge}, journal = {U\v{c}\"enye zapiski Kazanskogo universiteta. Seri\^a Fiziko-matemati\v{c}eskie nauki}, pages = {444--457}, publisher = {mathdoc}, volume = {159}, number = {4}, year = {2017}, language = {ru}, url = {http://geodesic.mathdoc.fr/item/UZKU_2017_159_4_a2/} }