TY  - JOUR
AU  - V. S. Zheltukhin
AU  - A. Yu. Shemakhin
AU  - T. N. Terentiev
AU  - E. S. Samsonova
TI  - Self-consistent in internal and external parameters model of indactively coupled rf discharge at low-pressure
JO  - Taurida Journal of Computer Science Theory and Mathematics
PY  - 2021
SP  - 24
EP  - 31
IS  - 2
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/TVIM_2021_2_a2/
LA  - ru
ID  - TVIM_2021_2_a2
ER  -