%0 Journal Article
%A V. S. Zheltukhin
%A A. Yu. Shemakhin
%A T. N. Terentiev
%A E. S. Samsonova
%T Self-consistent in internal and external parameters model of indactively coupled rf discharge at low-pressure
%J Taurida Journal of Computer Science Theory and Mathematics
%D 2021
%P 24-31
%N 2
%I mathdoc
%U http://geodesic.mathdoc.fr/item/TVIM_2021_2_a2/
%G ru
%F TVIM_2021_2_a2