TY - JOUR AU - I. V. Kochikov AU - Yu. S. Lagutin AU - A. A. Lagutina AU - D. V. Lukyanenko AU - A. V. Tikhonravov AU - A. G. Yagola TI - Raising the accuracy of monitoring the optical coating deposition by application of a nonlocal algorithm of data analysis JO - Sibirskij žurnal industrialʹnoj matematiki PY - 2020 SP - 93 EP - 105 VL - 23 IS - 2 PB - mathdoc UR - http://geodesic.mathdoc.fr/item/SJIM_2020_23_2_a6/ LA - ru ID - SJIM_2020_23_2_a6 ER -