%0 Journal Article %A I. V. Kochikov %A Yu. S. Lagutin %A A. A. Lagutina %A D. V. Lukyanenko %A A. V. Tikhonravov %A A. G. Yagola %T Raising the accuracy of monitoring the optical coating deposition by application of a nonlocal algorithm of data analysis %J Sibirskij žurnal industrialʹnoj matematiki %D 2020 %P 93-105 %V 23 %N 2 %I mathdoc %U http://geodesic.mathdoc.fr/item/SJIM_2020_23_2_a6/ %G ru %F SJIM_2020_23_2_a6