@article{SJIM_2014_17_4_a11, author = {S. I. Fadeev and E. G. Kostsov and D. O. Pimanov}, title = {Numerical study of mathematical models of {MEMS} resonators of different types}, journal = {Sibirskij \v{z}urnal industrialʹnoj matematiki}, pages = {120--135}, publisher = {mathdoc}, volume = {17}, number = {4}, year = {2014}, language = {ru}, url = {http://geodesic.mathdoc.fr/item/SJIM_2014_17_4_a11/} }