%0 Journal Article
%A Jingjie Wang
%A D. G. Piliptsov
%A A. V. Rogachev
%A A. S. Rudenkov
%A K. A. Sakhovsky
%A S. Yu. Chepkasov
%T Influence of deposition conditions on the structure and mechanical properties of a-C coatings
%J Problemy fiziki, matematiki i tehniki
%D 2024
%P 7-12
%N 4
%I mathdoc
%U http://geodesic.mathdoc.fr/item/PFMT_2024_4_a0/
%G ru
%F PFMT_2024_4_a0