TY  - JOUR
AU  - M. A. Yarmolenko
AU  - A. V. Rogachev
AU  - Jiang Xiao Hong
AU  - S. A. Frolov
TI  - Kinetic regularities of deposition and molecular structure of polyoxymethylene coatings formed from the active gas phase
JO  - Problemy fiziki, matematiki i tehniki
PY  - 2024
SP  - 57
EP  - 63
IS  - 2
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/PFMT_2024_2_a9/
LA  - ru
ID  - PFMT_2024_2_a9
ER  -